Title :
CMOS biosensor devices and applications
Author_Institution :
Depts. of Electr. Eng. & Appl. Phys., Yale Univ., New Haven, CT, USA
Abstract :
Affinity biosensor use bio-recognition element and transducers to convert the (bio)chemical event into a recordable signal. CMOS compatible silicon nanowires configured as field effect transistor (Si NW-FETs) have shown significant advantages for real-time, label-free and highly sensitive detection of a wide range of biomolecules. Here we discuss the physics, limitations, and applications for nanowire FETs sensor technologies.
Keywords :
CMOS integrated circuits; biochemistry; biosensors; elemental semiconductors; field effect transistors; molecular biophysics; nanowires; silicon; transducers; CMOS biosensor devices; CMOS compatible silicon nanowires; biochemical event; biomolecules; biorecognition element; biorecognition transducers; field effect transistor; high sensitive detection; silicon NW-FET; Biomedical optical imaging; Biosensors; DNA; Nanobioscience; Nanowires; Proteins; Silicon;
Conference_Titel :
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location :
Washington, DC
DOI :
10.1109/IEDM.2013.6724587