Exploring the design space of non-planar channels: Shape, orientation, and strain

We conduct a comprehensive simulation study of non-planar n-type channels based on consistent, physical models containing measurable quantities rather than fit-parameters. This contrasts empirical thin-body models used in classical/quantum-corrected TCAD. The method involves the self-consistent solution of the two-dimensional Schrödinger-Poisson system, combined with linearized Boltzmann transport in the third dimension. We advance the art of simulation by (i) introducing quantum simulation on unstructured meshes for arbitrary geometries, (ii) providing an efficient framework for rapid evaluation of device designs, and (iii) contributing a surface roughness scattering model for arbitrarily shaped surfaces. Consistent modeling allows us to make reliable assertions with respect to device performance.