Energy distribution in a quartz resonator

Author

Rösler, U. ; Ruile, W. ; Wagner, K. Ch ; Johannes, T.W. ; Scholl, G. ; Weigel, R.

Author_Institution

Siemens Matsushita Components GmbH & Co. KG, Munchen, Germany

Volume

1

fYear

1996

fDate

3-6 Nov 1996

Firstpage

1

Abstract

We present a theoretical analysis of the acoustical energy distribution in a surface acoustic wave (SAW) test resonator on the 34° cut of quartz. To calculate the energy density at each point for a known voltage, we chose a combination of three different methods: a P-Matrix algorithm for the longitudinal direction, a Stack-Matrix formalism across the aperture of the resonator and a Partial Wave Method normal to the substrate surface. We determined the distribution of energy in all three dimensions and located the peak stress at the metallization-vacuum interface

Keywords

acoustic intensity; failure analysis; matrix algebra; surface acoustic wave resonators; 34° cut; 450 MHz; P-matrix algorithm; SAW test resonator; SiO₂; acoustical energy distribution; energy density; energy distribution; failure mechanism; metallization-vacuum interface; partial wave method; peak stress; quartz resonator; stack-matrix formalism; two port resonator; Acoustic testing; Acoustic waves; Apertures; Failure analysis; Metallization; Stress; Surface acoustic wave devices; Surface acoustic waves; Surface treatment; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE

Conference_Location

San Antonio, TX

ISSN

1051-0117

Print_ISBN

0-7803-3615-1

Type

conf

DOI

10.1109/ULTSYM.1996.583766

Filename

583766