Title :
Accurate determination of thin film properties using SAW differential delay lines
Author :
Knapp, Matthias ; Jager, Philipp ; Grunauer, Gerold ; Scheinbacher, Gunter ; Bleyl, Ingo ; Reindl, Leonhard M.
Author_Institution :
TDK Corp., Munich, Germany
Abstract :
We have investigated a method to accurately determine elastic properties of thin films. For this purpose the phase velocity of a layered system is calculated using surface acoustic wave (SAW) differential delay lines on LiNbO3 substrates. The phase velocity can be calculated with an accuracy of Δvph = ±0.5m/s. The material parameters density, elastic constant (c11 and c44) and their temperature coefficients TC(c11) and TC(c44) of Si3N4 thin film have been determined. They could be extracted by fitting them to the calculated phase velocity of the layered system Si3N4/LiNbO3. Furthermore, the influence of deposition conditions on the material tensor data has been studied.
Keywords :
elastic constants; elasticity; silicon compounds; surface acoustic waves; thin films; LiNbO3; SAW; Si3N4; elastic constant; elastic properties; material property; material tensor; phase velocity; surface acoustic wave; thin film properties; Delay lines; Dispersion; Lithium niobate; Substrates; Surface acoustic waves; Tensile stress;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0434
