Title :
An advanced equivalent circuit for a piezoelectric micromachined ultrasonic transducer and its lumped parameter measurement
Author :
Yub Je ; Hongmin Ahn ; Kyounghun Been ; Wonkyu Moon ; Haksue Lee
Author_Institution :
Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., Pohang, South Korea
Abstract :
In this work, we developed an advanced equivalent circuit model for a piezoelectric micromachined ultrasonic transducer. The mechanical lumped parameters and the radiation impedance were obtained by considering the double-layer plate of a unimorph circular plate. Through the equivalent circuit model, the effect of a piezoelectric layer on the mechanical lumped parameters was considered. The model-produced admittance curves were compared with the measured admittance curves of the pMUT unit to verify the equivalent circuit model. A pMUT unit with a circular silicon radiating plate (radius 600 μm, thickness 15 μm) was used for measurements.
Keywords :
acoustic impedance; piezoelectric transducers; plates (structures); structural acoustics; ultrasonic measurement; ultrasonic transducers; circular silicon radiating plate; mechanical lumped parameter measurement; model-produced admittance curves; pMUT; piezoelectric layer; piezoelectric micromachined ultrasonic transducer; radiation impedance; size 15 mum; unimorph circular plate; Admittance; Admittance measurement; Atmospheric modeling; Equivalent circuits; Impedance; Integrated circuit modeling; Mathematical model; MEMS; equivalent circuit; pMUT; piezoelectric transducers; ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0072