DocumentCode
309586
Title
Interferometric investigation of SAW devices
Author
Sääskilahti, Simo ; Knuuttila, Jouni ; Kaivola, Matti ; Aminoff, Carl Gustaf ; Salomaa, M.M.
Author_Institution
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Volume
1
fYear
1996
fDate
3-6 Nov 1996
Firstpage
173
Abstract
A Michelson laser interferometer is constructed for investigating surface acoustic waves in SAW devices. The interferometer can detect transversal surface vibrations whose amplitude is on the order of an Angstrom. The frequency bandwidth extends to 1 GHz. High-precision micromechanical translation stages allow surface scans with a resolution better than a micrometer
Keywords
Michelson interferometers; light interferometry; measurement by laser beam; surface acoustic wave devices; vibration measurement; 1 GHz; 1 micron; Michelson laser interferometer; SAW devices; high-precision micromechanical translation stage; interferometric investigation; resolution; surface acoustic waves; surface scans; transversal surface vibrations; Acoustic beams; Acoustic signal detection; Acoustic waves; Frequency; Optical interferometry; Optical scattering; Optical surface waves; Semiconductor device measurement; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location
San Antonio, TX
ISSN
1051-0117
Print_ISBN
0-7803-3615-1
Type
conf
DOI
10.1109/ULTSYM.1996.583953
Filename
583953
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