• DocumentCode
    309601
  • Title

    Real time characterization of elastic variations in palladium films produced by hydrogen adsorption

  • Author

    Anisimkin, V.I. ; Kotelyanskii, I.M. ; Fedosov, V.I. ; Caliendo, C. ; Verardi, P. ; Verona, E.

  • Author_Institution
    Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
  • Volume
    1
  • fYear
    1996
  • fDate
    3-6 Nov 1996
  • Firstpage
    293
  • Abstract
    The magnitude and time variations of the SAW propagation velocity Δv/v, of the mass and elastic loading, and of the fractional changes in the density Δρ/ρ and in the elastic modulii Δcij/cij of Pd films are experimentally evaluated at room temperature and atmospheric pressure for 0.1, 0.5, 1% H2, 1% CO, 1% N2O and 1% NO gas mixtures in pure nitrogen. Two different thermally evaporated Pd films have been tested: one as evaporated, the other one after annealing at 423°K and 10-5 Pa for 15 hours. The annealing is shown to change all set of the parameters. For not annealed films, hydrogen gives rise to large variations in the elastic constants (≃5-40%) and to an increase in the phase velocity; while for annealed films, it produces small variations in the elastic constants (≃1-2%) and a decrease in the phase velocity. The difference is attributed to weakly and strongly coupled oxygen preadsorbed in the film. The results obtained can allow an improvement of Pd-based sensors
  • Keywords
    acoustic materials; adsorption; annealing; density; elastic constants; hydrogen; metallic thin films; palladium; surface acoustic waves; vacuum deposited coatings; 423 K; CO; H2; N2O; NO; Pd; SAW phase velocity; annealing; density; elastic constants; elastic loading; gas sensor; hydrogen adsorption; mass loading; palladium film; real time characteristics; thermal evaporation; Annealing; Differential equations; Hydrogen; Palladium; Sensor phenomena and characterization; Steady-state; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
  • Conference_Location
    San Antonio, TX
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-3615-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1996.583977
  • Filename
    583977