• DocumentCode
    309606
  • Title

    Surface acoustic wave properties of ZnO/DLC/Si(100) multilayer structure

  • Author

    Kim, Jin Yong ; Lee, Yong Eui ; Kim, Hyeong Joan ; Yang, Hyung Kook ; Park, Jong Chul ; Kim, Young Jin

  • Author_Institution
    Sch. of Mater. Sci. & Eng., Seoul Nat. Univ., South Korea
  • Volume
    1
  • fYear
    1996
  • fDate
    3-6 Nov 1996
  • Firstpage
    317
  • Abstract
    We investigated SAW properties of ZnO/DLC/Si (100) multilayer structure. Surface smoothness and intensity ratio of sp3/sp 2 of DLC films were enhanced with increasing a substrate d.c. bias voltage. At condition of KH(ZnO)=0.837 and KH(DLC)=0.262, the velocity of 1st mode wave was about 5,614 m/sec which was higher than cut-off velocity of ZnO/Si(100) structure
  • Keywords
    acoustic materials; carbon; silicon; surface acoustic waves; zinc compounds; SAW properties; ZnO-C-Si; ZnO/DLC/Si(100) multilayer; diamond-like carbon film; intensity ratio; substrate DC bias voltage; surface acoustic wave velocity; surface smoothness; Acoustic waves; Magnetic films; Nonhomogeneous media; Optical films; Piezoelectric films; SAW filters; Semiconductor films; Surface acoustic waves; Voltage; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
  • Conference_Location
    San Antonio, TX
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-3615-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1996.583982
  • Filename
    583982
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=309606