Mass sensitivity of acoustic plate mode in liquids

Author

Teston, F. ; Feuillard, Guy ; Tessier, L. ; Certon, D. ; Lethiecq, Marc

Author_Institution

LUSSI-GIP Ultrasons, Tours, France

Volume

1

fYear

1996

fDate

3-6 Nov 1996

Firstpage

327

Abstract

In this paper, the concept of electrical effective permittivity function is used to calculate the eigen-frequencies and the particle displacements of a piezoelectric Acoustic Plate Mode (APM). These results allow one to determine the mass sensitivities of the first order vibration modes used in a first order perturbation theory. Theoretical results are then discussed and compared to those of the Wang method in the case of a Shear Horizontal-APM sensor on ST cut quartz substrate. Experimental measurements by means of a copper electrodeposition are carried out and show that the perturbation method leads to a better understanding of the APM behavior

Keywords

eigenvalues and eigenfunctions; elastic waves; interdigital transducers; level measurement; microsensors; permittivity; quartz; IDTs; ST cut quartz substrate; eigenfrequencies; electrical effective permittivity function; electrodeposition; first order perturbation theory; first order vibration modes; liquid environments; mass sensitivity; microsensors; particle displacements; piezoelectric acoustic plate mode; shear horizontal-APM sensor; Acoustic propagation; Acoustic transducers; Acoustic waves; Boundary conditions; Frequency; Permittivity; Propagation constant; Surface acoustic waves; Surface waves; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE

Conference_Location

San Antonio, TX

ISSN

1051-0117

Print_ISBN

0-7803-3615-1

Type

conf

DOI

10.1109/ULTSYM.1996.583984

Filename

583984