Chemical sensor based on surface acoustic wave resonator incorporating Langmuir-Blodgett films

Author

Nomura, Tooru ; Takebayashi, Masaaki ; Furukawa, Shoji

Author_Institution

Shibaura Inst. of Technol., Tokyo, Japan

Volume

1

fYear

1996

fDate

3-6 Nov 1996

Firstpage

395

Abstract

A one-port SAW resonator incorporating Langmuir-Blodgett (LB) films has been investigated for a sensing element of chemical sensor. A 90 MHz SAW chemical sensor have been fabricated on ST cut quartz substrate and one-port resonator configuration have been used as a sensing element. Selective coatings have been deposited by the Langmuir-Blodgett method. The resonance frequency and the Q value have been measured as sensor response. Experimental results shown that the Q value and the resonance frequency of the one-port SAW resonator varied with the mass loading on SAW device surface. Especially, it was found that the measurement of Q value is very suitable for SAW sensor response

Keywords

Langmuir-Blodgett films; Q-factor; chemical sensors; surface acoustic wave resonators; surface acoustic wave sensors; 90 MHz; Langmuir-Blodgett film; Q value; ST cut quartz substrate; SiO₂; chemical sensor; mass loading; one-port SAW resonator; resonance frequency; selective coating; surface acoustic wave resonator; Acoustic waves; Chemical elements; Chemical sensors; Coatings; Frequency measurement; Q measurement; Resonance; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE

Conference_Location

San Antonio, TX

ISSN

1051-0117

Print_ISBN

0-7803-3615-1

Type

conf

DOI

10.1109/ULTSYM.1996.583999

Filename

583999