• DocumentCode
    309762
  • Title

    The influence of PcCu layer crystalline structure on the parameters of SAW gas sensors

  • Author

    Hechner, J. ; Wróbel, T.

  • Author_Institution
    Inst. of Electron. Mater. Technol., Warsaw, Poland
  • fYear
    1996
  • fDate
    5-7 Mar 1996
  • Firstpage
    370
  • Lastpage
    375
  • Abstract
    This paper presents some problems concerned with SAW NO2 sensors employing copper phthalocyanine (PcCu) as the chemical interface. We have investigated the influence of crystalline structure of PcCu coating on the sensor sensitivity of generated frequency. The experiments were carried out for SAW delay lines on STX quartz and 128° YX lithium niobate. It was found that for the investigated range of parameters the β-PcCu layer provides several times better sensor sensitivity and temperature stability of SAW delay line generation frequency than α-PcCu layer of the same mass. This is valid for both substrates used
  • Keywords
    surface acoustic wave sensors; LiNbO3; NO2; SAW delay lines; SAW gas sensors; STX quartz; copper phthalocyanine layer; delay line generation frequency; layer crystalline structure influence; organic semiconductor layer; response time; sensitivity; sensor parameters; temperature stability;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    European Frequency and Time Forum, 1996. EFTF 96., Tenth (IEE Conf. Publ. 418)
  • Conference_Location
    Brighton
  • ISSN
    0537-9989
  • Print_ISBN
    0-85296-661-X
  • Type

    conf

  • DOI
    10.1049/cp:19960077
  • Filename
    584890