Feeding of submillimeter-sized microparts along an asymmetric surface using only horizontal vibration: Evaluation of micro-fabricated surface using femtosecond laser process

Microparts can be fed along an asymmetric surface using simple planar symmetric vibrations, because they adhere to the surface asymmetrically. We assessed an asymmetric surface microfabricated by femtosecond laser process. The tribological characteristics were evaluated by measuring the angle of friction of these capacitors. Using the results of feeding experiments of these capacitors, we assessed the relationship between driving frequency and feeding velocity.