Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films

Author

Eichenfield, M. ; Olsson, Roy H.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

fYear

2013

fDate

21-25 July 2013

Firstpage

753

Lastpage

756

Abstract

Transducers are designed and fabricated that produce a Gaussian acoustic beam in a 750 nm thick suspended aluminum nitride membrane. The properties of the acoustic beam formed by the transducer are studied by means of a scanning confocal balanced homodyne interferometer, which we use for Doppler vibrometery. We also study the RF transmission properties of the acoustic beams as they interact with sub-wavelength aperture waveguides.

Keywords

Doppler effect; III-V semiconductors; acoustic transducers; acoustic wave interferometers; aluminium compounds; interdigital transducers; membranes; piezoelectric thin films; piezoelectric transducers; wide band gap semiconductors; AlN; Doppler vibrometery; Gaussian acoustic beam; RF interdigitatal transducer design; RF transmission properties; acoustic beam properties; radio-frequency IDT measurement; scanning confocal balanced homodyne interferometer; size 750 nm; sub-wavelength aperture waveguides; thick suspended aluminum nitride membrane; thin piezoelectric films; transducer design; wavelength-scale structures; Acoustic beams; Crystals; Electrodes; Insertion loss; Laser beams; Piezoelectric transducers; Aluminum nitride; Doppler vibrometry; Lamb wave transducers; acoustic focusing;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0194

Filename

6725232