DocumentCode
3101416
Title
Improvement of Fast and Precise Positioning of Large-Scale High-Precision Step-Stage Based on Vibration Suppression PTC
Author
Sakata, Koichi ; Fujimoto, Hiroshi ; Shimoyama, Takachika ; Saiki, Kazuaki
Author_Institution
Yokohama Nat. Univ., Yokohama
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
339
Lastpage
344
Abstract
In the positioning system of the large-scale high-precision step-stage, the primary resonance mode appears in low frequency even in the high stiffness stage. The resonance mode is a major obstacle of fast and precise positioning. In this paper, we apply vibration suppression PTC (perfect tracking control) which can control the resonance mode actively on the large- scale stage. Finally, simulations and experiments are performed to show the advantages of the vibration suppression PTC.
Keywords
large-scale systems; position control; vibration control; large-scale high-precision step-stage; perfect tracking control; positioning system; vibration suppression; Control systems; Fasteners; Frequency; Large-scale systems; Liquid crystal displays; Resonance; Sampling methods; Target tracking; Vibration control; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics Society, 2007. IECON 2007. 33rd Annual Conference of the IEEE
Conference_Location
Taipei
ISSN
1553-572X
Print_ISBN
1-4244-0783-4
Type
conf
DOI
10.1109/IECON.2007.4460340
Filename
4460340
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