Title :
VEL 15-second Generation of SOPRA´s VELL industrial excimer laser, energy up to 20)
Author :
Godard, B. ; Murer, P. ; Stehle, M. ; Bonnet, J. ; Figache, D.
Keywords :
Annealing; Chemical lasers; Gas lasers; Laser beams; Laser modes; Laser stability; Laser theory; Power lasers; Pump lasers; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.521312
