3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System

Author

Lin Liu ; Huikai Xie

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

Volume

25

Issue

15

fYear

2013

fDate

Aug.1, 2013

Firstpage

1478

Lastpage

1480

Abstract

We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μm at only 3.2 V. The two-dimensional MEMS mirror can achieve ± 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μm, respectively.

Keywords

biological tissues; biomedical optical imaging; brain; laser beam applications; micro-optomechanical devices; microlenses; micromirrors; optical microscopes; optical microscopy; optical scanners; 3-D confocal laser scanning microscopy; MEMS lens scanner; PDMS; acute rat brain tissue; axial resolutions; confocal microscope; full-MEMS scanning system; lateral resolutions; microparticles; three-dimensional confocal reflectance images; two-axis lateral scan; two-dimensional MEMS mirror; two-dimensional confocal reflectance images; voltage 3.2 V; voltage 4.5 V; 3-D scan; MEMS lens; MEMS mirror; confocal microscopy; thermal actuation;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2013.2267794

Filename

6544566