Title :
Achieving next generation performance of ion implanters with the Varian Control System (VCS)
Author :
Viviani, G.L. ; Parisi, N.A. ; Callahan, W.G. ; Zimmermann, L.M.
Author_Institution :
Varian Semicond. Equip., Gloucester, MA, USA
Abstract :
This paper addresses the practical realization of a complex hierarchical control system, which is able to maintain controllability and observability conditions in a fault tolerant manner for a variety of ion implanters as well as other related systems
Keywords :
controllability; controllers; integrated circuit manufacture; ion implantation; observability; semiconductor device manufacture; VCS; Varian Control System; complex hierarchical control system; controllability conditions; fault tolerance; ion implanters; next generation performance; observability conditions; Clocks; Control systems; Controllability; Fault tolerant systems; Large-scale systems; Modems; Observability; State estimation; Synchronization; Time measurement;
Conference_Titel :
Ion Implantation Technology, 2000. Conference on
Conference_Location :
Alpbach
Print_ISBN :
0-7803-6462-7
DOI :
10.1109/.2000.924177
