Modeling and parameters identification of the cross roller guide way

The cross roller guide way used in high-acceleration and high-precision motion platform of chip packaging equipment has an important effect on the dynamic performance of the platform. In this paper, the cross roller guide way is simplified to a five degree-of-freedom system and the theoretical model is built according to its working conditions. An experimental system is established and the stiffness and damping of the guide way are identified by a modal testing. By the method of finite element analysis (FEA), the first five mode shapes of the guide way are calculated and they give a more comprehensive description of the vibration characteristics of the cross roller guide way, compared with the traditional double degree-of-freedom model.