Title :
Experiments and analysis for micro-nozzle/diffuser flow and micro valveless pumps
Author :
Jiang, X.N. ; Zhou, Zi Yao ; Yang, Yi ; Huang, X.Y. ; Liu, Charles Y.
Author_Institution :
Sch. of Mech. & Production Eng., Nanyang Technol. Inst.
Abstract :
Conventional nozzle/diffuser flow with different Reynolds number ranges was analyzed. The static model of valveless pumps was proposed. The relationship between nozzle/diffuser flow coefficients and the performance of valveless pumps was simulated. For experiments, the silicon nozzle/diffuser elements with conical angles of 5°, 7.5° and 10° and the silicon micro valveless pump wafer were fabricated. The experimental results were discussed and conclusions made
Keywords :
elemental semiconductors; flow control; microactuators; micropumps; nozzles; silicon; Reynolds number ranges; Si; Si nozzle; conical angles; diffuser elements; diffuser flow; micro valveless pumps; micro-nozzle; performance; static model; Control systems; Fluid flow control; Friction; Instruments; Micromechanical devices; Micropumps; Performance analysis; Pumps; Semiconductor device modeling; Silicon;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613661
