Title :
The characterization of nanostructured copper-doped tin oxide films for gas sensor microarrays
Author :
Sysoev, Victor ; Kisin, Vladimir ; Frietsch, Markus ; Kiselev, Ilia ; Habicht, Wilhelm ; Bruns, Michael ; Goschnick, Joachim
Author_Institution :
Lab. for Sensors & Microsyst., Saratov State Tech. Univ., Russia
Abstract :
In this paper, we describe thin nanostructured SnO2:Cu films fabricated by RF magnetron sputtering and characterized with a variety of surface analytical techniques. The average grain size of the 200-1000 nm thick films with columnar structure was determined to be 20-100 nm. A slight oxygen deficiency was observed at the film surface by XPS with [O]/[Sn] ratio equal to about 1.6. Based on these films, gas sensor microarrays of the KAMINA (Karlsruhe Micronose) type were built up. The gas sensitivity of the film sensor segments operated at 350°C was found suitable to respond to tested reducing gases (ammonia, acetone, alcohols) with response times of less than 10 sec.
Keywords :
II-VI semiconductors; X-ray photoelectron spectra; copper; electric sensing devices; electronic noses; grain size; microsensors; nanoelectronics; sputter deposition; tin compounds; 10 sec; 200 to 1000 nm; 350 C; KAMTNA; Karlsruhe Micronose type gas sensor microarrays; RF magnetron sputtering; SnO2:Cu; XPS; acetone; alcohols; ammonia; average grain size; columnar structure; film surface oxygen deficiency; gas sensitivity; gas sensor microarrays; nanostructured copper-doped tin oxide films; reducing gases; response times; surface analytical techniques; thin nanostructured SnO2:Cu films; Copper; Gas detectors; Gases; Grain size; Magnetic analysis; Radio frequency; Sputtering; Testing; Thick films; Tin;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426117
