Title :
Modification of polymer swelling by UV irradiation for use in chemical sensing
Author :
Goustouridis, D. ; Chatzandroulis, S. ; Raptis, I. ; Valamontes, E.S.
Author_Institution :
Inst. of Microelectron. NCSR, Athens, Greece
Abstract :
The effect of UV irradiation on the swelling properties of polymer layers as a function of the chain scission degree is studied, using while light interferometry. The use of patternable polymeric films and their subsequent UV irradiation treatment as a means to engineer individual sensor sensitivities in chemical sensor arrays is proposed. First results with polyhydroxy-ethyl-methacrylate (PHEMA) before and after deep UV irradiation, for three different exposure doses are presented. The relative expansion of the layer was clearly found to depend on the irradiation conditions.
Keywords :
chemical sensors; light interferometry; polymer films; swelling; ultraviolet radiation effects; PHEMA; UV exposure dose; bimorph chemical sensors; chain scission degree; chemical sensing; chemical sensor arrays; deep UV irradiation effects; layer relative expansion; patternable polymeric films; polyhydroxy-ethyl-methacrylate; polymer layer swelling modification; white light interferometry; Chemical sensors; Chemical technology; Optical fibers; Optical films; Optical interferometry; Optical polymers; Polymer films; Sea measurements; Sensor arrays; Wavelength measurement;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426125
