• DocumentCode
    311735
  • Title

    Piezoelectric and pyroelectric microsystems based on ferroelectric thin films

  • Author

    Muralt, P.

  • Author_Institution
    Lab. de Ceramique, Ecole Polytech. Fed. de Lausanne, Switzerland
  • Volume
    1
  • fYear
    1996
  • fDate
    18-21 Aug 1996
  • Firstpage
    145
  • Abstract
    The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in ultrasonic micromotors and pyroelectric infra-red detectors. The deposition of such films and the principal processes for their integration onto silicon substrates are fairly well mastered. Current efforts concentrate on tailoring the film properties for the various applications, and on optimization of the device designs and patterning processes
  • Keywords
    ferroelectric thin films; infrared detectors; lead compounds; micromotors; piezoceramics; pyroelectric detectors; ultrasonic motors; PZT; PbZrO3TiO3; deposition; device fabrication; ferroelectric thin film; integration; piezoelectric microsystem; pyroelectric infrared detector; silicon substrate; ultrasonic micromotor; Fabrication; Ferroelectric films; Ferroelectric materials; Infrared detectors; Micromotors; Piezoelectric films; Pyroelectricity; Semiconductor films; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
  • Conference_Location
    East Brunswick, NJ
  • Print_ISBN
    0-7803-3355-1
  • Type

    conf

  • DOI
    10.1109/ISAF.1996.602725
  • Filename
    602725
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=311735