DocumentCode :
3118732
Title :
Study of nano Fe2O3 MOS thick films as ethanol gas sensor
Author :
Jain, G.H. ; Pawar, N.K.
Author_Institution :
Dept. of Phys., Arts, Commerce & Sci. Coll., Nandgaon, India
fYear :
2011
fDate :
Nov. 28 2011-Dec. 1 2011
Firstpage :
116
Lastpage :
119
Abstract :
Thick films of AR Grade nano Fe2O3 material with n type semiconducting properties were prepared and tested for their gas sensing performances. Thick films of the materials were prepared by screen printing technique. The gas sensing performance was studied using static gas sensing system. The material was tested for various gases such as CO, CO2, NH3, Cl2, H2, LPG, ethanol and H2S. The nano Fe2O3 film showed maximum sensitivity to Ethanol gas at 350°C temperature and at 250 ppm concentration with short response time and large recovery time. Physical and structural properties of the films material were studied by TEM, XRD.
Keywords :
MIS devices; gas sensors; iron compounds; nanosensors; thick films; Fe2O3; MOS thick films; TEM; XRD; ethanol gas sensor; screen printing technique; sensitivity; structural properties; temperature 350 degC; Ethanol; Gas detectors; Materials; Ethanol; Gas sensor; Nano Fe2O3; sensitivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensing Technology (ICST), 2011 Fifth International Conference on
Conference_Location :
Palmerston North
ISSN :
2156-8065
Print_ISBN :
978-1-4577-0168-9
Type :
conf
DOI :
10.1109/ICSensT.2011.6136944
Filename :
6136944
Link To Document :
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