A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: modeling and characterization

Author

Bochobza-Degani, O. ; Seter, D.J. ; Socher, E. ; Nemirovsky, Y.

Author_Institution

Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel

fYear

2000

fDate

2000

Firstpage

425

Lastpage

428

Abstract

A new analytical approach for modeling the pull-in condition of voltage controlled electrostatic actuators (VCEA) with a general single degree of freedom (DOF) and general shape is presented. The presented approach gives a more general view of the pull-in condition in electrostatic actuators. The pull-in condition for an electrostatic actuator is defined in the voltage and degree of freedom plane. Then a general algebraic equation, referred to as the pull-in equation, is derived for the actuator. The solution of this equation directly yields the pull-in condition. Several case studies are then presented and their pull-in characteristics are summarized

Keywords

electrostatic actuators; equations; micro-optics; mirrors; modelling; characterization; general single DOF; generalized algebraic equation; micromachined electrostatic micromirrors; modeling; pull-in characteristics; pull-in condition; pull-in equation; single degree of freedom; voltage controlled electrostatic actuators; Capacitance; Dynamic range; Electrostatic actuators; Equations; Micromirrors; Optical arrays; Shape control; Stability; Switches; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and electronic engineers in israel, 2000. the 21st ieee convention of the

Conference_Location

Tel-Aviv

Print_ISBN

0-7803-5842-2

Type

conf

DOI

10.1109/EEEI.2000.924457

Filename

924457