Title :
Resonant Properties of GaPO4 Resonator Device Coated with Plasma Polymerized Styrene Film
Author :
Aizawa, Hidenobu ; Inoue, Yoshiharu ; Yamada, Kazunori ; Hirata, Mitsuo ; Koyama, Mitsuaki ; Kurosawa, Shigeru
Author_Institution :
National Inst. of Adv. Ind. Sci. & Technol., Tsukuba
Abstract :
Recently, quartz crystal microbalance (QCM) techniques have found widely applications in chemical and biosensor. The quartz crystal of AT-cut used for the QCM method. This cutting mode of quartz crystal device shows good temperature-compensated behavior of the resonant frequency around room temperature, but the maximum operating temperature is limited due to the phase transition near 570 degree C. For this weak point, QCM technique limited low temperature applications under 200 degrees C. In this study, the resonant properties of GaPO4 resonator coated with plasma-polymerized styrene film (PPSF) as mass loading effect were examined and compared with that of QCM device
Keywords :
crystal resonators; gallium compounds; microbalances; polymer films; polymerisation; GaPO4; mass loading effect; phase transition; plasma polymerized styrene film; quartz crystal device cutting mode; quartz crystal microbalance techniques; resonant frequency; resonant properties; resonator device; Biosensors; Chemicals; Plasma applications; Plasma chemistry; Plasma devices; Plasma properties; Plasma temperature; Polymer films; Resonance; Resonant frequency; Gallium phosphate (GaPO4); plasma-polymerized styrene film (PPSF); quartz crystal microbalance (QCM); resonant properties;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275405
