Title :
A CMOS sensor array IC for Van der Waals enhanced MOSFET and Taguchi type sensors
Author :
Sonkusale, S.R. ; Kish, L. ; Cheng, M. ; Marlow, W. ; Kim, Y. ; Agarwal, A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Tufts Univ., Medford, MA, USA
Abstract :
A CMOS sensor array IC capable of performing fluctuation enhanced sensing for two different chemical sensing devices has been designed. The targeted sensing devices are the novel Van der Waals force enhanced MOSFET for gas and nano-particle detection and sputtered ZnO thin films as Taguchi-type sensors for gas detection. The sensor output contains information in the dynamic stochastic fluctuations around the mean value which prove useful for detection of sub-ppm concentrations of gaseous molecules. This paper discusses an implementation of fluctuation-enhanced sensing on silicon. The CMOS sensor IC consists of a low-noise transimpedance amplifier filter bank and output buffers. The circuits are all designed to operate at temperatures as high as 200°C with low leakage currents. The overall CMOS system on chip exhibited enhanced selectivity and accuracy in providing unique signatures for gas detection.
Keywords :
CMOS integrated circuits; amplifiers; channel bank filters; gas sensors; nanoparticles; silicon; system-on-chip; zinc compounds; CMOS sensor array IC; Taguchi type sensors; Van der Waals sensors; ZnO; chemical sensing devices; dynamic stochastic fluctuations; enhanced MOSFET sensors; filter bank; fluctuation enhanced sensing; gas detection; low-noise transimpedance amplifier; nanoparticle detection; output buffers; silicon; sputtered ZnO thin films; system on chip; CMOS integrated circuits; Chemical sensors; Fluctuations; Force sensors; Gas detectors; MOSFET circuits; Nanoscale devices; Sensor arrays; Thin film sensors; Zinc oxide;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426336
