High-Finesse Micromachined Fabry-Perot Cavities with Silicon/Air DBR Mirrors

Author

Pruessner, M.W. ; Stievater, Todd H. ; Rabinovich, William S.

Author_Institution

Naval Res. Lab., Washington, DC

fYear

2006

fDate

Oct. 2006

Firstpage

46

Lastpage

47

Abstract

Micromachined Fabry-Perot cavities with cryogenically-etched silicon/air DBR mirrors and integrated SOI rib waveguides are demonstrated. Various devices exhibit Q=10774, FWHM=0.15 nm, finesse=196, FSR=81.7 nm and DBR mirror reflectance R=0.985. Thermo-optic tuning over 6.7 nm is also demonstrated

Keywords

Fabry-Perot resonators; cryogenics; distributed Bragg reflectors; etching; integrated optics; micro-optomechanical devices; micromechanical resonators; optical fabrication; optical tuning; optical waveguides; reflectivity; rib waveguides; silicon-on-insulator; thermo-optical effects; DBR mirror reflectance; Si-SiO₂; cryogenically-etched silicon-air DBR mirrors; high-finesse micromachined Fabry-Perot cavities; integrated SOI rib waveguides; thermo-optic tuning; Distributed Bragg reflectors; Etching; Fabry-Perot; Mirrors; Optical losses; Optical resonators; Optical scattering; Optical waveguides; Reflectivity; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE

Conference_Location

Montreal, Que.

Print_ISBN

0-7803-9555-7

Electronic_ISBN

0-7803-9555-7

Type

conf

DOI

10.1109/LEOS.2006.278811

Filename

4054048