Title :
2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160)
Abstract :
The following topics were dealt with. Factory dynamics; process control; advanced process technology; yield modelling and analysis; and defect detection and reduction
Keywords :
factory automation; integrated circuit manufacture; integrated circuit technology; process control; semiconductor process modelling; advanced process technology; defect detection; defect reduction; factory dynamics; process control; yield modelling;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI
Conference_Location :
Munich, Germany
Print_ISBN :
0-7803-6555-0
DOI :
10.1109/ASMC.2001.925601
