Dual-Pulse control to eliminate bouncing of Ohmic RF MEMS switch

In this paper, a dynamic model of an Ohmic RF MEMS switch has been developed. The model accounts for the real beam geometry, electrostatic actuation, damping and spring-like contact mechanism. The Dual-Pulse control method is used to minimize the bouncing behaviour of RF MEMS switch. The actuation waveform consists of two pulses and a rest period in between. The high voltage pulse pulls the beam downward at a high speed to close the switch. At the rest period, there is no voltage applied, damping and restoring forces slow the beam to near-zero velocity when approaching the on-stage position. The low voltage pulse keeps the beam in a closed position. In this work, the efficiency and robustness of the dual-pulse approach were validated through the simple, fast and accurate simulation technique. The simulation data obtained from the dynamic model shows that the bouncing is eliminated and the speed velocity is minimized at approach to the closed position.