Microfabricated near-field scanning microwave probes

Design, microfabrication and characterization of co-axial microwave tips compatible with commercial atomic force microscope (AFM) are discussed. Simultaneous microwave and AFM images of materials, cells and devices, obtained using these tips, reveal interesting "inner" structures undetectable using AFM alone. The near-field microwave co-axial tips are capable of performing measurements both in reflection (R) and transmission (T) modes. R/T capability enables them to map the microwave conductivity/permittivity of objects or image electromagnetic near-field radiation patterns near active devices or through various objects over a wide frequency range of 0.5-20 GHz with possible extensions up to 100 GHz.