DocumentCode
3132979
Title
1998 Symposium on VLSI Technology Digest of Technical Papers [Front Matter]
fYear
1998
fDate
9-11 June 1998
Abstract
Presents the front matter from the conference proceedings.
Keywords
VLSI; integrated circuit technology; Cu interconnect; DRAM; FeRAM; RF MOSFET; SOI; SRAM; VLSI technology; capacitor; deep submicron MOSFET; deep submicron patterning; flash memory; gate dielectric; gate technology; hot carriers; interconnect; reliability; shallow junction; shallow trench isolation; silicide;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1998. Digest of Technical Papers. 1998 Symposium on
Conference_Location
Honolulu, HI, USA
Print_ISBN
0-7803-4770-6
Type
conf
DOI
10.1109/VLSIT.1998.689175
Filename
689175
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