Title :
Simultaneous measures of temperature and expansion on electronic compound
Author :
Fontaine, Maxime ; Joubert, Eric ; Latry, Olivier ; Gauthier, Christian ; Regard, Charles ; Polaert, Hubert ; Eudeline, Philippe ; Ketata, Mohamed
Author_Institution :
Insitut Langevin, CNRS, Paris, France
Abstract :
In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode.
Keywords :
Michelson interferometers; electrostatic discharge; infrared detectors; integrated circuits; temperature measurement; ESD diode; IR camera; Michelson interferometer; microelectronic compounds; optical system; physical value measurement; surface expansion; surface temperature; Interference; Measurement by laser beam; Optical interferometry; Optical sensors; Temperature measurement; Temperature sensors; Voltage measurement; Expansion; Interferometry; Micro-Electronic; Reflection; Temperature;
Conference_Titel :
Semiconductor Thermal Measurement and Management Symposium (SEMI-THERM), 2011 27th Annual IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-61284-740-5
DOI :
10.1109/STHERM.2011.5767201
