DocumentCode
3137833
Title
Transmission electron microscopy determination of quantum dot profile
Author
Liao, X.Z. ; Zou, J. ; Duan, X.F. ; Cockayne, D.J.H. ; Leon, R. ; Lobo, C.
Author_Institution
Sydney Univ., NSW, Australia
fYear
1999
fDate
1999
Firstpage
106
Lastpage
108
Abstract
Investigation of the morphology of buried and unburied Inx Ga1-xAs/GaAs quantum dots (QDs) has been carried out using cross-section transmission microscopy and the [001] on-zone bright-field technique with image simulation. The study shows that both the buried and unburied QDs are lens-shaped
Keywords
III-V semiconductors; buried layers; gallium arsenide; indium compounds; interface structure; semiconductor quantum dots; transmission electron microscopy; InGaAs-GaAs; [001] on-zone bright-field technique; buried InxGa1-xAs/GaAs quantum dots; cross-sectional TEM; image simulation; lens-shaped QDs; morphology; quantum dot profile; transmission electron microscopy; unburied InxGa1-xAs/GaAs quantum dots; Analytical models; Capacitive sensors; Diffraction; Gallium arsenide; Lenses; Optical materials; Quantum dots; Shape; Transmission electron microscopy; US Department of Transportation;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on
Conference_Location
Perth, WA
Print_ISBN
0-7803-4513-4
Type
conf
DOI
10.1109/COMMAD.1998.791594
Filename
791594
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