Angular and linear microvibromotor

Author

Hélin, Philippe ; Sadaune, Véronique ; Druon, Christian

Author_Institution

Dept. Opto-Acous.-Electron., Inst. d´´Electron. et de Microelecton. du Nord, Villeneuve d´´Ascq, France

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

61

Abstract

This paper reports a novel ultrasonic driven microvibromotor. An angular and linear microvibromotor is obtained from a motorization by surface acoustic waves generated from an interdigital transducer on a LiNbO₃ substrate. The linear and rotational movements are obtained according to the position of the slider with respect to the acoustic beam. The displacement of the slider is controlled from the burst duration applied across the interdigital transducer. This device is capable of nanometer resolution, for a travel area of over 40 mm square and of rotation until 360° with a resolution better than 0.1

Keywords

interdigital transducers; linear motors; micromotors; position control; sliding friction; surface acoustic wave transducers; ultrasonic motors; LiNbO₃; LiNbO₃ substrate; acoustic beam; angular linear microvibromotor; burst duration; frictional contact; interdigital transducer; nanometer resolution; slider displacement control; slider position; surface acoustic waves; travel area; ultrasonic driven microvibromotor; Acoustic beams; Acoustic transducers; Acoustic waves; Actuators; Friction; Nanoscale devices; Substrates; Surface acoustic wave devices; Surface acoustic waves; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613581

Filename

613581