High-speed micro-electromechanical light modulation arrays

Author

Perregaux, G. ; Weiss, P. ; Kloeck, B. ; Vuilliomenet, H. ; Thiébaud, J.P.

Author_Institution

CSEM Centre Suisse d´´Electron. et de Microtech. SA, Neuchatel, Switzerland

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

71

Abstract

Arrays of electromechanically operated optical microshutters have been designed, fabricated with polysilicon micromachining and tested. An innovative operation principle is described, which combines high switching speed, large lateral displacement while keeping low operating voltage. The main results obtained are switching speed of 50 μs for a lateral displacement of 30 μm, at a switching voltage of typically 70 V

Keywords

elemental semiconductors; integrated optics; microactuators; optical elements; optical modulation; silicon; 30 mum; 50 mus; 70 V; Si; electromechanically operated optical microshutters; lateral displacement; microelectromechanical light modulation arrays; polysilicon micromachining; switching speed; switching voltage; Blades; Electrodes; Electrostatics; High speed optical techniques; Micromachining; Optical arrays; Optical modulation; Optical surface waves; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613584

Filename

613584