DocumentCode
314109
Title
Designing, realization and characterization of a novel capacitive pressure/flow sensor
Author
Oosterbroek, R.E. ; Lammerink, T.S.J. ; Berenschot, J.W. ; van den Berg, A. ; Elwenspoek, M.C.
Author_Institution
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
151
Abstract
This paper reports the design, realization and characterization results of an integrated pressure/flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises highly accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques
Keywords
capacitance measurement; flow measurement; flowmeters; microsensors; pressure measurement; pressure sensors; capacitive pressure/flow sensor; flow-rate measurement; hydraulic resistor; liquids; micro analysis systems; micromachining techniques; pressure measurement; Biomembranes; Capacitance; Capacitive sensors; Electrodes; Fluid flow control; Fluid flow measurement; Pressure measurement; Resistors; Sensor phenomena and characterization; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613605
Filename
613605
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