Actuated polysilicon micromirrors for raster-scanning displays

Author

Kiang, Meng-Hsiung ; Francis, Dan A. ; Chang-Hasnain, Connie J. ; Solgard, O. ; Lau, Kam Y. ; Muller, Richard S.

Author_Institution

California Univ., Berkeley, CA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

323

Abstract

We have designed and fabricated polysilicon microscanners using surface micromachining technologies. The scanners have electrostatic-comb actuators to drive 300×400 μm² micromirrors mounted on stationary frames by torsion bars. Torsion-bar mounting improves scanning precision from what is achievable using hinge mounting with journal bearings. The scans are accurate to 0.19 mrad; that is a scan jitter of 0.1% of the full scale, or 9% of a pixel. A 7×10-pixel laser-scanning display built with a 7-element, fan-diode-laser array and a scanning polysilicon micromirror is presented. A dual axis, raster-scanning system based on similar resonant microscanners can be integrated on a chip with the light sources to produce compact microdisplay modules

Keywords

display devices; electrostatic devices; elemental semiconductors; integrated optics; jitter; microactuators; micromachining; mirrors; optical fabrication; optical scanners; physical instrumentation control; semiconductor laser arrays; silicon; torsion; 300 mum; 400 mum; Si; actuated polysilicon micromirrors; chip integration; compact microdisplay modules; dual axis raster-scanning system; electrostatic-comb actuators; fan-diode-laser array; laser-scanning display; light sources; polysilicon microscanners; raster-scanning displays; scan jitter; scanning polysilicon micromirror; scanning precision; stationary frames; surface micromachining; torsion-bar mounting; Bars; Displays; Electrostatic actuators; Fasteners; Jitter; Light sources; Micromachining; Micromirrors; Optical arrays; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613649

Filename

613649