• DocumentCode
    314155
  • Title

    Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry

  • Author

    Brugger, J. ; Willemin, M. ; Rossel, C. ; Beljakovic, G. ; Vettiger, P.

  • Author_Institution
    Zurich Res. Lab., IBM Res. Div., Ruschlikon, Switzerland
  • Volume
    1
  • fYear
    1997
  • fDate
    16-19 Jun 1997
  • Firstpage
    419
  • Abstract
    We describe the fabrication and first characterization of piezoresistive cantilevers developed for ultrasensitive torque magnetometry. The levers have been designed to optimize the sensing in both flexion and torsion modes
  • Keywords
    magnetometers; microsensors; piezoresistive devices; semiconductor technology; silicon-on-insulator; Si-SiO2; flexion; microfabrication; piezoresistive cantilevers; torque magnetometry; torsion modes; ultrasensitive piezoresistive cantilevers; ultrasensitive torque magnetometry; Etching; Fabrication; Magnetic anisotropy; Magnetic field measurement; Magnetic sensors; Perpendicular magnetic anisotropy; Piezoresistance; Resists; Superconducting magnets; Torque measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
  • Conference_Location
    Chicago, IL
  • Print_ISBN
    0-7803-3829-4
  • Type

    conf

  • DOI
    10.1109/SENSOR.1997.613674
  • Filename
    613674
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=314155