A micro-fluid channel calorimeter using BiSb/Sb thin film thermopiles

Author

Zieren, M. ; Köhler, J.M.

Author_Institution

Microsyst. Dept., Inst. of Phys. High Technol. Jena, Germany

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

539

Abstract

Here, a new type of micro calorimeter is presented, characterized by a thermally insulated flow channel with two inlets and one outlet, an interdiffusion zone, and a detection zone with integrated thin film transducers based on thermopiles of the highly sensitive material combination of Bi_0.87Sb_0.13 and Sb. This micro fluid calorimeter can be integrated in flow injection arrangements. This way, the general principle of heat detection can be introduced in micro flow injection analysis and related applications. The micro fluid device is characterized by thermal relaxation measurements and by chemical testing

Keywords

antimony; bismuth compounds; calorimeters; fluidic devices; micromachining; micropumps; microsensors; thermocouples; thermopiles; thin film devices; BiSb-Sb; anisotropic wet etching; chemical testing; detection zone; freestanding membrane; integrated thin film transducers; interdiffusion zone; micro flow injection analysis; micro fluid device; micro-fluid channel calorimeter; microcalorimeter; syringe pump; thermal relaxation; thermally insulated flow channel; thin film thermopiles; Biomembranes; Glass; Insulation; Polymer films; Silicon; Sputtering; Thermoelectricity; Transducers; Transistors; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613706

Filename

613706