The use of nano-crystalline oxides as gas sensing materials

Author

Williams, Geraint ; Coles, Gary S V ; Ferkel, Hans ; Riehmann, Werner

Author_Institution

Dept. of Electr. & Electron. Eng., Univ. of Wales, Swansea, UK

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

551

Abstract

Nano-sized powders of Al₂O₃, ZrO₂ and SnO₂ have been produced by laser ablation of ceramic samples. A study of the gas sensing characteristics of thick films prepared from these materials revealed that zirconia based sensors respond to H₂ at a temperature of 100°C, while thick films of alumina display marked changes in both resistance and capacitance as a function of relative humidity at room temperature. Nanocrystalline SnO₂ sensors respond markedly to mixtures of H₂, CO and CH₄ in the 200-600°C temperature range. Sensitivity values are higher than those obtained using SnO₂ samples prepared via a conventional wet chemistry route

Keywords

alumina; capacitance; ceramics; electric resistance; gas sensors; nanostructured materials; powder technology; pulsed laser deposition; semiconductor materials; thick films; tin compounds; zirconium compounds; 100 C; 200 to 600 C; Al₂O₃; CO; H₂; H₂ response; H₂-CO-CH₄ mixtures; SnO₂; ZrO₂; capacitance change; ceramic samples; gas sensing characteristics; gas sensing materials; laser ablation; methane; nano-crystalline oxides; nano-sized powders; relative humidity dependence; resistance change; sensitivity values; thick films; Capacitive sensors; Ceramics; Gas detectors; Gas lasers; Laser ablation; Nanostructured materials; Optical materials; Powders; Temperature sensors; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613709

Filename

613709