Title :
The use of nano-crystalline oxides as gas sensing materials
Author :
Williams, Geraint ; Coles, Gary S V ; Ferkel, Hans ; Riehmann, Werner
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Wales, Swansea, UK
Abstract :
Nano-sized powders of Al2O3, ZrO2 and SnO2 have been produced by laser ablation of ceramic samples. A study of the gas sensing characteristics of thick films prepared from these materials revealed that zirconia based sensors respond to H2 at a temperature of 100°C, while thick films of alumina display marked changes in both resistance and capacitance as a function of relative humidity at room temperature. Nanocrystalline SnO2 sensors respond markedly to mixtures of H2, CO and CH4 in the 200-600°C temperature range. Sensitivity values are higher than those obtained using SnO2 samples prepared via a conventional wet chemistry route
Keywords :
alumina; capacitance; ceramics; electric resistance; gas sensors; nanostructured materials; powder technology; pulsed laser deposition; semiconductor materials; thick films; tin compounds; zirconium compounds; 100 C; 200 to 600 C; Al2O3; CO; H2; H2 response; H2-CO-CH4 mixtures; SnO2; ZrO2; capacitance change; ceramic samples; gas sensing characteristics; gas sensing materials; laser ablation; methane; nano-crystalline oxides; nano-sized powders; relative humidity dependence; resistance change; sensitivity values; thick films; Capacitive sensors; Ceramics; Gas detectors; Gas lasers; Laser ablation; Nanostructured materials; Optical materials; Powders; Temperature sensors; Thick films;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613709
