Title :
A microcatalytic support realised by LIGA technique: the devil´s comb
Author :
Basrour, Skandar ; Mougin, Pascal ; Pons, Michel ; Bernede, Philippe ; Daniau, William ; Villermaux, Jacques
Author_Institution :
Inst. des Microtech. de Franche-Comte, Besancon, France
Abstract :
Microreactors are considered a new opportunity for R&D operations and for the production of hazardous or ultrapure materials where and when they are needed. Most chemical reactions are enhanced by a catalytic process involving a porous support for the catalyst. A microstructure exhibiting a fractal property is proposed as a porous network. A LIGA technique is used to manufacture a number of such structures. Limits and difficulties occurring are discussed
Keywords :
X-ray lithography; catalysis; chemical technology; electroforming; fractals; micromachining; micromechanical devices; LIGA technique; X-ray lithography; catalytic process; devil´s comb; fractal property; microcatalytic support; microchemical components; micromachined systems; microreactors; porous support; ultrapure materials; Chemical processes; Chemical sensors; Chemical transducers; Diffusion processes; Fractals; Manufacturing; Mass production; Passive optical networks; Research and development; Teeth;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613735
