Fluorocarbon film for protection from alkaline etchant and elimination of in-use stiction

Author

Matsumoto, Yoshinori ; Yoshida, Kazumasa ; Ishida, Makoto

Author_Institution

Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

695

Abstract

Several deposition techniques and the characteristics of fluorocarbon (FC) films have been investigated. FC film was spin-coated from Cyclized Perfluoro Polymer (CPFP) commercialized as CYTOP. Because of the excellent durability towards alkali or acid, the FC film was used for circuit area protection of an integrated accelerometer during silicon alkaline etching process by 25wt% TMAH at 90°C. Moreover, FC films were formed on a field-free zone with a capacitive coupling type plasma polymerization equipment using perfluorinated liquid (C₇F₁₆,C₈F₁₈, etc.) as monomer species. The deposition rate and thermal stability of the films were investigated. The FC films are effective for elimination of in-use stiction for surface micromachining devices

Keywords

accelerometers; etching; micromachining; microsensors; organic compounds; polymer films; polymerisation; protective coatings; thermal stability; 90 C; CYTOP; Si; TMAH; alkaline etchant protection; capacitive coupling type plasma polymerization; circuit area protection; cyclized perfluoro polymer; deposition rate; deposition techniques; durability; field-free zone; fluorocarbon films; in-use stiction; integrated accelerometer; perfluorinated liquid; spin coating; stiction elimination; surface micromachining devices; thermal stability; Accelerometers; Commercialization; Coupling circuits; Etching; Plasma applications; Plasma stability; Polymer films; Protection; Semiconductor films; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613747

Filename

613747