Design and Fabrication of a Micro Coulter Counter with Thin Film Electrodes

Author

Zheng, Siyang ; Tai, Yu-Chong

Author_Institution

Electr. Eng., California Inst. of Technol., Pasadena, CA

fYear

2006

fDate

9-12 May 2006

Firstpage

16

Lastpage

19

Abstract

We report a new approach for micro Coulter counter with thin film electrodes. Traditional Coulter counter measures DC resistance change to sense particles passing through an aperture between two flow chambers. One of the biggest challenges to miniaturize the device is to overcome the large resistance encountered. We propose a new approach to use thin film metal electrodes in micron size range for sensing. Resolution can be improved and it´s easy for system integration. A device based on this approach was built and tested

Keywords

bioMEMS; biomedical equipment; biomedical measurement; blood; microelectrodes; thin film sensors; DC resistance measurement; MEMS device design; flow chamber; micro Coulter counter fabrication; thin film metal electrodes; Apertures; Biomedical electrodes; Blood; Counting circuits; Electric resistance; Electrical resistance measurement; Fabrication; Immune system; Impedance; Transistors; Coulter counter; impedance; particle sensing; thin film metal electrodes;

fLanguage

English

Publisher

ieee

Conference_Titel

Microtechnologies in Medicine and Biology, 2006 International Conference on

Conference_Location

Okinawa

Print_ISBN

1-4244-0338-3

Electronic_ISBN

1-4244-0338-3

Type

conf

DOI

10.1109/MMB.2006.251479

Filename

4281296