Title :
A Photovoltaically Modulated MEMS Optical Scanner for Fiber Endoscope
Author :
Chong, Changho ; Isamoto, Keiji ; Nakada, Mayumi ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Santec Corp., Komaki
Abstract :
We have developed a new SiP (system in package) style optical MEMS (microelectromechanical system) component for fiber optic endoscope that operates without using external power supply. The endoscope sensor head (5 mm in outer diameter) attached at the end of an optical fiber is designed for the use of in vivo medical diagnosis such as gastrointestinal tact or vascular vein monitor by using an infrared probe light at a 1.3-micron-wavelength. Another infrared light of at a 1.5-micron-wavelength is used in the identical optics in a WDM (wavelength division multiplex) manner to generate the drive voltage (of up to 5 V) in the package by using a collocated photovoltaic cell. This paper describes the architecture of the optical actuation system, the scanner design and fabrication. Modulation of the MEMS scanner is demonstrated using the optical modulation, by which the risk of electrocution or electromagnetic interference is avoided
Keywords :
bioMEMS; biomedical optical imaging; blood vessels; endoscopes; micro-optomechanical devices; optical modulation; optical scanners; photovoltaic cells; 1.3 micron; 1.5 micron; 5 mm; WDM; collocated photovoltaic cell; electrocution risk elimination; electromagnetic interference elimination; endoscope sensor head; fiber optic endoscope; gastrointestinal tact; in vivo medical diagnosis; infrared probe light; optical actuation system; optical modulation; photovoltaic modulated MEMS optical scanner; system in package style optical microelectromechanical system; vascular vein monitor; wavelength division multiplex; Biomedical optical imaging; Endoscopes; Micromechanical devices; Optical fiber sensors; Optical fibers; Optical modulation; Optical sensors; Packaging; Photovoltaic systems; Solar power generation; endoscope; optical modulation; optical scanner;
Conference_Titel :
Microtechnologies in Medicine and Biology, 2006 International Conference on
Conference_Location :
Okinawa
Print_ISBN :
1-4244-0337-5
Electronic_ISBN :
1-4244-0338-3
DOI :
10.1109/MMB.2006.251510
