Intrinsic Time Zero Dielectric Breakdown Characteristics of HfAlO Alloys

A thermochemical model describing the relationship between the dielectric breakdown field (EBD) and dielectric constant (k) of high- k dielectric has been calibrated for Hf_xAl_1-xO_y alloys with k values from 7 to 24. Metal-insulator-metal (MIM) capacitors with Hf_xAl_1-xO_y high- k dielectric films were used to extract the intrinsic time zero dielectric breakdown characteristics. Breakdown field values of these Hf_xAl_1-xO_y alloys were found to decrease as a function of k^-0.77 while the electric field acceleration parameter, γ, increases as a function of k^1.37. Using the thermochemical model calibrated with the experimental data, a Hf_xAl_1-xO_y 10-year lifetime was extrapolated as a function of the dielectric constant to provide insight for future dielectric development.