DocumentCode :
3147044
Title :
Micro power generator with high-performace polymer electret
Author :
Suzuki, Yuji ; Edamoto, Masato ; Kasagi, Nobuhide ; Kashiwagi, Kimiaki ; MORIZAWA, Yoshitomi
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo
fYear :
2008
fDate :
15-17 Sept. 2008
Abstract :
Vibration-driven electret generator has been developed with the aid of MEMS technologies. Parylene high-aspect-ratio spring is successfully microfabricated to support an in-plane seismic mass. Resonant frequency as low as 37Hz has been achieved with a large in-plane amplitude of 1 mm. With our early prototype, we have obtained 21 Vp-p voltage output.
Keywords :
electrets; electric generators; micromechanical devices; polymers; MEMS technology; micro power generator; parylene; polymer electret; resonant frequency; vibration-driven electret generator; Electrets; Electrodes; Glass; Induction generators; Micromechanical devices; Polymers; Power generation; Resonant frequency; Springs; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrets, 2008. ISE-13. 13th International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4244-1850-3
Electronic_ISBN :
978-1-4244-1851-0
Type :
conf
DOI :
10.1109/ISE.2008.4814034
Filename :
4814034
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3147044
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