Title :
Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches
Author :
Goldsmith, Charles ; Sumant, A. ; Auciello, O. ; Carlisle, J. ; Zeng, Hengli ; Hwang, James C. M. ; Palego, Cristiano ; Wang, W. ; Carpick, R. ; Adiga, V.P. ; Datta, Amitava ; Gudeman, Chris ; O´Brien, S. ; Sampath, Smita
Author_Institution :
MEMtronics Corporation, Plano, United States
Abstract :
Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5–6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.
Keywords :
Art; Capacitors; Degradation; Dielectric devices; Dielectric materials; Laboratories; Microswitches; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-6056-4
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2010.5518076
