Sol-gel barium titanate thin films on nickel alloy electrodes

Author

Ogawa, T. ; Saitoh, S. ; Sugiyama, O. ; Kondoh, A. ; Mochizuka, T. ; Masuda, H.

Author_Institution

Shizuoka Inst. of Sci. & Technol., Fukuroi, Japan

fYear

1991

fDate

33457

Firstpage

399

Lastpage

403

Abstract

A nickel (Ni) alloy has been applied to bottom electrodes of BaTiO ₃ thin films and 2-6 mole % La modified BaTiO₃ thin films prepared by sol-gel processing. The gel films on a substrate of soda-lime glass with Ni alloy bottom electrodes were crystallized at a temperature of 600°C. The grains with the size of 1-2 μm consisted of subgrains (20 nm) and the grain size was decreased with increasing La substitution. The remanent polarization of the films decreased with the increase of La substitution and with the decrease of the grain size

Keywords

barium compounds; dielectric hysteresis; dielectric polarisation; electrodes; ferroelectric materials; ferroelectric thin films; grain size; nickel alloys; sol-gel processing; 600 degC; BaTiO₃; BaTiO₃ thin films; La substitution; Ni alloy electrodes; bottom electrodes; dielectric properties; ferroelectric properties; grain size; remanent polarization; soda-lime glass substrate; sol-gel processing; Barium; Crystallization; Electrodes; Glass; Grain size; Nickel alloys; Polarization; Temperature; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on

Conference_Location

University Park, PA

Print_ISBN

0-7803-1847-1

Type

conf

DOI

10.1109/ISAF.1994.522386

Filename

522386