Title :
The formation of a fine-patterned ferroelectric thin film from a sol-gel solution containing a photo-sensitive water-generator
Author :
Soyama, Nobuyuki ; Sasaki, Go ; Atsuki, Tsutomu ; Yonezawa, Tadashi ; Ogi, Katsumi
Author_Institution :
Central Res. Inst., Mitsubishi Mater.l Corp., Saitama, Japan
Abstract :
A fine-patterned PZT film was successfully formed from a photo-sensitive sol-gel solution by means of UV-irradiation. This solution was prepared from lead acetate, zirconium n-butoxide, titanium i-propoxide, 2-methoxyethanol. O-nitrobenzyl alcohol (NBA) was used as a water-generator. Spin-coated PZT gel films on various substrates were irradiated with UV rays through a photo-mask pattern to facilitate hydrolysis reaction and developed with developer. The obtained pattern was a negative of the mask. The films were finally annealed for crystallization. The obtained films had perovskite structures and good electrical properties
Keywords :
dielectric losses; ferroelectric thin films; lead compounds; permittivity; photochemistry; piezoceramics; sol-gel processing; 2-methoxyethanol; PZT; PZT film; PbZrO3TiO3; UV-irradiation; crystallization; electrical properties; fine-patterned ferroelectric thin film; hydrolysis reaction; lead acetate; o-nitrobenzyl alcohol; perovskite structures; photo-mask pattern; photo-sensitive water-generator; sol-gel solution; titanium i-propoxide; zirconium n-butoxide; Annealing; Crystallization; Ferroelectric films; Ferroelectric materials; Optical films; Sputtering; Substrates; Titanium; Transistors; Zirconium;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522388
