Title :
Scanning probe microscope system design with Linear Velocity Transducer for feedback compensation
Author :
Chang, Po-Kuang ; Lin, Jium-Ming
Author_Institution :
Inst. of Technol. & Sci., Chung-Hua Univ., Hsinchu
Abstract :
This research is to use linear velocity transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by Matlab simulation and practical implementation of a surface profiler to reduce the hysteresis effect of the force actuator.
Keywords :
actuators; control system synthesis; damping; feedback; mathematics computing; scanning probe microscopy; transducers; Matlab simulation; feedback compensation; force actuator; inner-loop damping; linear velocity transducer; scanning probe microscope system; transient control; Coils; Feedback; Force control; Force measurement; Hydraulic actuators; Rough surfaces; Scanning probe microscopy; Springs; Transducers; Voltage; LVDT; LVT; Load cell; Surface profiler;
Conference_Titel :
SICE Annual Conference, 2008
Conference_Location :
Tokyo
Print_ISBN :
978-4-907764-30-2
Electronic_ISBN :
978-4-907764-29-6
DOI :
10.1109/SICE.2008.4655063
